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Hasil Pencarian

Ditemukan 2 dokumen yang sesuai dengan query
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Jamal A. Rachman
Abstrak :
SiO2 merupakan lapisan yang sensitif dan aktif dalam komponen-konponen semikonduktor. Dalam proses oksidasi pembuatan komponen KOSFET, dapat terjadi pencemaran lapisan isolator ini karena kontaminasi. Pencemaran menyebabkan terjadinya ion-bergerak di dalam lapisan oksida, sehingga mengganggu kestabilan sifat listrik. Dengan menggunakan Trichloroethylene (TCE) sebagai ambient pada proses oksidasi, diharapkan jumlah ion-bergerak dapat ditekan dan terjadi efek pasivasi (passivatioti ability). Untuk melihat pengaruh Trichloroethylene, dilakukan proses biasa dan proses menggunakan TCE dengan variasi laju arus. Untuk mendapatkan informasi sifat listrik dilakukan pengukuran dengan menggunakan Q-meter dan C-V ploter. Konsentrasi ion-bergerak dapat ditekan dari 3.32 X 1011 sampai menjadi 3.08 X 1010 Coul.Cm-2. Dan mendapatkan sifat kestabilan karakteristik konduktifitas atas perubahan temperatur.
Depok: Universitas Indonesia, 1989
T-Pdf
UI - Tesis Membership  Universitas Indonesia Library
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Abstrak :
This study develops, evaluates, and optimizes the potential of a novel "counter-diffusional? membrane biofilm reactor to biologically treat and remove trichloroethylene (TCE) from contaminated soil and groundwater caused by industrial activities (industrial solvent). The objectives of the research are to investigate and evaluate design and operational factors reflecting the sustainability and degradation rates of TCE transformation in a counter-diffusional membrane-attached methanotrophic biofilm reactor system As a first step attaining this objective, an overall mass transfer coeficient of the bioreactor was developed a 23 laboratory experimental design have already conducted, and the development of a mathematical model and computer simulation describing the concentration profile of substrates and TCE within the biofilm has been introduced A maximum sustainable TCE removal j7|o: of 205 Elmo!/m7/day was successfully attained when the CH,ยข utilization rate was 11.67 mmoles/m2/hr, the TCE loading rate was approximately 400 mol/m2/day. Normal probability plot and pareto chart indicated that methane partial pressure (P) and hydraulic Reynolds 's numbers (Re) have important and significant positive effects on the TCE degradation rates. The average percentage of TCE removal eficiency falls between 78.6 and 94. 7%.
Jurnal Teknologi ; Vol. 19 (3) September 2005 : 267-277, 2005
JUTE-19-4-Des2005-267
Artikel Jurnal  Universitas Indonesia Library