Hsu, Tai-Ran
MEMS & microsystems : design and manufacture
McGraw-Hill, 2002
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Poole, Charles P.
Introduction to nanotechnology
John Wiley & Sons, 2003
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Jones, Richard A. L.
Soft machines: nanotechnology and life
Oxford University Press, 2007
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Hall, J. Storrs
Nanofuture: what's next for nanotechnology
Prometheus Books, 2005
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Madou, Marc J.
Fundamentals of microfabrication and nanotechnology
CRC Press, 2012
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