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"Contents :
- Editor
- Authors
- Abbreviations
- Chapter 1: Introduction
- Chapter 2: Overview of SIMOX technology: historical perspective
- Chapter 3: Fundamental processes in SIMOX layer formation: ion
implantation and oxide growth
- Chapter 4: SIMOX/SOI processes: flexibility based on thermodynamic
considerations
- Chapter 5: Electrical and optical characterisation of SIMOX substrates
- Chapter 6: SIMOX material technology from R&D to advanced products
- Subject Index "
London: Institution of Engineering and Technology, 2009
e20452680
eBooks Universitas Indonesia Library
