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Abstrak :
ABSTRAK Teknologi atau metode Sol Gel telah banyak digunakan untuk beberapa aplikasi. Salah satu diantaranya adalah untuk pemrosesan/pembuatan lapisan tipis (thin film). Salah satu batasan/kekurangan dari metode Sol-Gel ini adalah tingginya temperatur yang dibutuhkan pada saat fase pembakaran (firing step). Pada pane/Wan ini akan ditunjukkan bahwa pembuatan lapisan tipis TiO2 dengan menggunakan metode Sol-Gel dapat dilakukan pada temperatur rendah. Cara yang digunakan ialah dengan memodifikasi/menggabungkan metode Sol-Gel dengan penembakan ion berenergi (ion bombardment). Hasil pane/Wan ini menunjukkan bahwa penembakan dengan menggunakan ion Hidrogen pada energi sebesar 25 keV serta dosis sebesar 1XTOrs ions/cm2 menunjukkan hasil yang bagus dalam hal bentuk permukaan dari film/lapisan (surface morphology) dan juga sifat mekaniknya.

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ABSTRACT Sol-Gel technology has been widely used for many applications. One of them is for thin film processing. One limitation of this process is the high temperature process during the firing step. In this project, it was shown that it is possible to obtain TiO2 so! gel thin films at low temperature. The method used was ion bombardment on the unfired TiO2 sol gel thin films. With this method, we can obtain a thin film with similar mechanical property and surface morphology to that obtain by conventional so/ gel route_ Bombardment of hydrogen ions with energy of 25 keV and dose of 1X10'16 ions/cm2 have shown a very good result in terms of surface morphology and mechanical properties.

Abstrak :
The book provides a detailed, up-to-date account of the basics, the technology, and the clinical use of ion beams for radiation therapy. Theoretical background, technical components, and patient treatment schemes are delineated by the leading experts that helped to develop this field from a research niche to its current highly sophisticated and powerful clinical treatment level used to the benefit of cancer patients worldwide. This book consists of related chapters. It is a common achievement by 76 experts from around the world. Their expertise reflects the diversity of the field with radiation therapy, medical and accelerator physics, radiobiology, computer science, engineering, and health economics. The book addresses a similarly broad audience ranging from professionals that need to know more about this novel treatment modality or consider to enter the field of ion beam therapy as a researcher. However, it is also written for the interested public and for patients who might want to learn about this treatment option.