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Abstrak :
ABSTRAK
Kaca konduktor memiliki fungsi strategis di berbagai aplikasi elektronik. Jenis yang menjanjikan adalah Fluorine-doped Tin Oxide (FTO). Dalam penelitian ini dilakukan studi pengaruh waktu deposisi (5, 10, 20, 30, dan 40 menit) lapisan tipis FTO dengan metode spray pyrolysis menggunakan alat ultrasonic nebulizer yang telah dimodifikasi terhadap nilai karakteristik lapisannya ditinjau dari sifat optis, kristalinitas, resistivitas, dan mikrostruktur. Variasi juga dilakukan dengan membandingkan prekursor Sn murni dan larutan yang telah didoping dengan F sebanyak 2%wt untuk melihat pengaruh penambahan doping F pada larutan prekursor. Pengujian karakteristik lapisan dilakukan menggunakan XRD, SEM, UV-Vis spectroscopy, dan digital multimeter. Berdasarkan karakterisasi yang dilakukan diperoleh nilai terbaik untuk FTO yang dihasilkan adalah pada waktu deposisi 20 menit dengan nilai transmitansi 74%, energi band gap (Eg) 3,85 eV, dan sheet resistance (Rs) 7,99 Ω/sq.

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ABSTRACT
Conductive glass has strategic functions in various electronic applications. One of the lead is Fluorine-doped Tin Oxide (FTO). In this research, the effects of deposition time (5,10,20,30, and 40 minutes) for fabrication of FTO thin film upon spray pyrolysis process using modified ultrasonic nebulizer on its characteristic in terms of optical, crystalinity, resistivity and microstructure properties has been studied. Variation was also performed by comparing the pure Sn precursor and the solution that has been doped with F 2%wt to see the doping effect to properties of thin film. The thin film characterization were carried out using XRD, SEM, UV-Vis spectroscopy, and digital mutlimeter. Based on the results obtained for the best FTO was generated at the time of deposition is 20 minutes. Providing 74% transmittance, band gap energy (Eg) 3.85 eV and sheet resistance (Rs) 7.99 Ω/sq.

Abstrak :
Fluorine-doped tin oxide (FTO) is one of the conductive glasses that have strategic functions in various important applications, including dye-sensitized solar cell (DSSC). In the current work, the effects of deposition time (5, 10, 20, 30, and 40 minutes) upon the fabrication process of FTO thin film using spray pyrolysis technique with modified ultrasonic nebulizer has been studied in regard to its microstructural, optical, crystallinity, and resistivity characteristics. The variation was also performed by comparing the pure tin chloride precursor and the solution that was doped with fluor (F) at 2 wt% in order to see the doping effect on the properties of thin film. The thin films were characterized using x-ray diffraction (XRD), scanning electron microscope (SEM), ultraviolet-visible (UV-Vis) spectroscopy, and digital multimeter. On the basis of current investigation, it has been found that the best FTO was obtained through the pyrolysis technique of 20-minute deposition time, providing optical transmittance of 74%, a band gap energy (Eg) of 3.85 eV and sheet resistance (Rs) of 7.99 Ω/sq. The fabricated FTO in the present work is promising for further development as conducting glass for dye-sensitized solar cell (DSSC).

Abstrak :
Fluorine-doped tin oxide (FTO) is one of the conductive glasses that have strategic functions in various important applications, including dye-sensitized solar cell (DSSC). In the current work, the effects of deposition time (5, 10, 20, 30, and 40 minutes) upon the fabrication process of FTO thin film using spray pyrolysis technique with modified ultrasonic nebulizer has been studied in regard to its microstructural, optical, crystallinity, and resistivity characteristics. The variation was also performed by comparing the pure tin chloride precursor and the solution that was doped with fluor (F) at 2 wt% in order to see the doping effect on the properties of thin film. The thin films were characterized using x-ray diffraction (XRD), scanning electron microscope (SEM), ultraviolet-visible (UV-Vis) spectroscopy, and digital multimeter. On the basis of current investigation, it has been found that the best FTO was obtained through the pyrolysis technique of 20-minute deposition time, providing optical transmittance of 74%, a band gap energy (Eg) of 3.85 eV and sheet resistance (Rs) of 7.99 ?/sq. The fabricated FTO in the present work is promising for further development as conducting glass for dye-sensitized solar cell (DSSC).