Baca, Albert G.
"Contents :
- Acknowledgment
- Abbreviations
- Chapter 1: Introduction to GaAs devices
- Chapter 2: Semiconductor properties, growth, characterisation and
processing techniques
- Chapter 3: Cleaning and passivation of GaAs and related alloys
- Chapter 4: Wet etching and photolithography of GaAs and related alloys
- Chapter 5: Dry etching of GaAs and related alloys
- Chapter 6: Ohmic contacts
- Chapter 7: Schottky contacts
- Chapter 8: Field effect transistors
- Chapter 9: Heterojunction bipolar transistors
- Chapter 10: Wet oxidation for optoelectronic and MIS GaAs devices
- Glossary
- Index "
